Ultra-compact digital pressure controller AP160M/CV150 series
The AP160M is ideal for vacuum process equipment from low vacuum to high vacuum.
The AP160M controls the pressure within a designated piping by analogically controlling the opening of a proportional solenoid valve. This device is designed to accommodate clean gases, such as those used in semiconductors, with pressure sensors and gas-contacting parts made entirely of metal. The CV150 series also controls the pressure within a designated piping by analogically controlling the opening of a proportional solenoid valve. This device does not have a built-in pressure sensor, allowing for different functions compared to models with integrated sensors by using external pressure or flow sensors. For more details, please contact us or refer to the catalog.
- Company：エー・シー・イー
- Price：Other
